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  • Tokyo Electron Tel Wafer Deposition Batch Furnance MRT300
Tokyo Electron Tel Wafer Deposition Batch Furnance MRT300

Tokyo Electron Tel Wafer Deposition Batch Furnance MRT300

  • Process: Magnetic anneal
  • throughput: 200 WPH6.25wph with perpendicular anneal, 2.5wph with in-plane anneal
  • Wafer Size (mm):300
  • Substrates: Si
  • Product description: Tokyo Electron Tel Wafer Deposition Batch Furnance MRT300 provide magnetic annealing process, Process: Magnetic anneal, throughput: 200 WPH6.25wph with perpendicular anneal, 2.5wph with in-plane anne
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Tokyo Electron Tel Wafer Deposition Batch Furnance MRT300

Specifications:

Contribute to the magnetic properties improvement on the magnetic devices in various situations
MRT series provides optimum magnetic annealing process for a wide variety of magnetic devices such as Magnetoresistive random-access memory (MRAM), HDD heads, magneto-sensors for smart power, smartphone, automobile and other applications. Due to the increasing demand for fast, low power consuming and nonvolatile memory devices, the global market for MRAM will grow in the future. In particular, perpendicular magnetic tunnel junction (P-MTJ) MRAM is highly expected as next generation memory for high performance computing and other emerging applications. The system’s unique thermal processing technology in a uniform magnetic field realizes excellent film thickness distribution and enhanced magneto-characteristics of each device.
MRT300 is a fully automated high-magnetic-field annealing system for 300mm wafers which suitable for R&D, prototype manufacturing, small volume production. The system provides variable magnetic field (up to five Tesla), 25 wafers in a batch, and strengthens the temperature control up to 550 degrees C plus or minus 1 degree, with high throughput rapid ramp over technology. Furthermore, applying wide range of magnetic field angle processes (in-plane, out of plane) by some parameter control of recipe management software, it allows repeatable temperature control without any hardware changes.

Product Comparison:

MRT300

MRT5000

MRT200

MATr

MATrSM

Wafer size (mm)

300

100,150,200,300

100,150,200

100,150,200

100,150,200

Availability

New

New

New

New

New

Production load max

10/25: in-plane/perpendicular

25

25

10

Customized

Throughput 
(Based on 2 hours @ soak temp)

6.25wph with perpendicular anneal,
2.5wph with in-plane anneal

6.25wph @200 or less,
2.5wph @300

6.25wph @200 or less

4wph @200 or less

Customized to reqirements

Process

Magnetic anneal

Magnetic anneal

Magnetic anneal

Magnetic anneal

Magnetic field direction setting

Substrates

Si

Si, AlTiC

Si, AlTiC

Si, AlTiC

Slider assemblies

Safety

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

Additional features

Cryogen free magnet,
Transverse & perpendicular anneal,
Small footprint

Cryogen free magnet,
Transverse & perpendicular anneal,
Small footprint
Bridge tool

Cryogen free magnet,
Transverse anneal,
Small footprint
Bridge tool

Cryogen free magnet,

Transverse & perpendicular anneal,
Small footprint,
Bridge tool

Cryogen free magnet,
High throughput

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !