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  • Tokyo Electron Tel Wafer Deposition Batch Furnace MRT200
Tokyo Electron Tel Wafer Deposition Batch Furnace MRT200

Tokyo Electron Tel Wafer Deposition Batch Furnace MRT200

  • Process: Magnetic anneal
  • Throughput (wph): 6.25wph @200 or less
  • Wafer Size (mm): 100,150,200
  • Substrates: Si, AlTiC
  • Product description: Tokyo Electron Tel Wafer Deposition Batch Furnace MRT200, Process: Magnetic anneal, Throughput (wph): 6.25wph @200 or less, Wafer Size (mm): 100,150,200, Substrates: Si, AlTiC
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Tokyo Electron Tel Wafer Deposition Batch Furnace MRT200

Specifications:

Contribute to the magnetic properties improvement on the magnetic devices in various situations
MRT series provides optimum magnetic annealing process for a wide variety of magnetic devices such as Magnetoresistive random-access memory (MRAM), HDD heads, magneto-sensors for smart power, smartphone, automobile and other applications. Due to the increasing demand for fast, low power consuming and nonvolatile memory devices, the global market for MRAM will grow in the future. In particular, perpendicular magnetic tunnel junction (P-MTJ) MRAM is highly expected as next generation memory for high performance computing and other emerging applications. The system’s unique thermal processing technology in a uniform magnetic field realizes excellent film thickness distribution and enhanced magneto-characteristics of each device.
MRT200 is a modular platform for magnetic annealing of 150mm and 200mm wafer size with magnetic fields up to 0.2 Tesla and at temperatures up to 400 degree C. The tool incorporates a magnet design that minimizes the stray magnetic field of the tool, allowing the installation of multiple tools in close proximity for volume production. The tool can be supplied with a single process module or can be configured with multiple process modules. Product can be manually or automatically loaded, with a single wafer handling robot addressing the process modules. This design provides high wafer throughput in a compact package, incorporating unrivalled process flexibility and reliability.

Product Comparison:

MRT300

MRT5000

MRT200

MATr

MATrSM

Wafer size (mm)

300

100,150,200,300

100,150,200

100,150,200

100,150,200

Availability

New

New

New

New

New

Production load max

10/25: in-plane/perpendicular

25

25

10

Customized

Throughput
(Based on 2 hours @ soak temp)

6.25wph with perpendicular anneal,
2.5wph with in-plane anneal

6.25wph @200 or less,
2.5wph @300

6.25wph @200 or less

4wph @200 or less

Customized to reqirements

Process

Magnetic anneal

Magnetic anneal

Magnetic anneal

Magnetic anneal

Magnetic field direction setting

Substrates

Si

Si, AlTiC

Si, AlTiC

Si, AlTiC

Slider assemblies

Safety

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

S2/S8, CE, NFPA 79

Additional features

Cryogen free magnet,
Transverse & perpendicular anneal,
Small footprint

Cryogen free magnet,
Transverse & perpendicular anneal,
Small footprint
Bridge tool

Cryogen free magnet,
Transverse anneal,
Small footprint
Bridge tool

Cryogen free magnet,

Transverse & perpendicular anneal,
Small footprint,
Bridge tool

Cryogen free magnet,
High throughput

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

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FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !