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  • Tokyo Electron Tel Wafer Deposition Batch Furnace EXIM
Tokyo Electron Tel Wafer Deposition Batch Furnace EXIM

Tokyo Electron Tel Wafer Deposition Batch Furnace EXIM

  • Process: Magnetic tunneling junction
  • Sputtering Source: Multi cathode PVD
  • Wafer Size (mm):300
  • Substrates: Si
  • Product description: Tokyo Electron Tel Wafer Deposition Batch Furnace EXIM with 300mm PVD system, Process: Magnetic tunneling junction, Sputtering Source: Multi cathode PVD, Wafer Size (mm):300, Substrates: Si

Tokyo Electron Tel Wafer Deposition Batch Furnace EXIM


A flexible tool for next generation semiconductor devices
The EXIM series expands TEL’s product portfolio with an innovative 300mm PVD system that delivers excellent performance for forming complex multi-stack thin films. Process modules can be flexibly configured or added to accommodate various applications at different stages from R&D to high volume production. EXIM makes a significant contribution to the industry especially in the area of depositing multilayer films for Spin Transfer Torque Random Access Memory (STT-MRAM), a very promising next-generation non-volatile memory.
The EXIM is a unique flexible and extendible PVD system that provides excellent productivity for the formation of multi-layered stacks such as perpendicular Magnetic Tunnel Junctions (MTJs). Designed distinctly from typical PVD systems, the EXIM comprises of process and transfer modules that can be freely configured to meet challenging customer needs, from development to manufacturing. With newly developed deposition methods, the system provides improved tool up-time, low particle generation on the wafer surface, and excellent within-wafer uniformity and stability. Moreover, the EXIM delivers precise interface and composition control by the adoption of multiple cathodes as sputter sources. Perpendicular MTJs, key to the manufacturing of energy-saving STT-MRAM devices, may be made of more than 25 layers. The EXIM provides both high productivity and excellent film stack performance even for the complex processes required by such structures. With the exceptional flexibility and extendibility of the EXIM system, we expect the scope of process applications to expand continuously in the near future.

Product Comparison:


Wafer size (mm)





Magnetic tunneling junction

Sputtering Source

Multi cathode PVD


S2/S8, CE



Additional features

Flexibility, Extendibility


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !