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  • Tokyo Electron Tel Tokyo Electron Tel Batch Furnace single wafer deposition system Triase+ Ti/TiN
Tokyo Electron Tel Tokyo Electron Tel Batch Furnace single wafer deposition system Triase+ Ti/TiN

Tokyo Electron Tel Tokyo Electron Tel Batch Furnace single wafer deposition system Triase+ Ti/TiN

  • Application: Contact, Capacitor electrode
  • Process: CVD Ti/TiN
  • Wafer Size (mm):300
  • Substrates: Si
  • Product description: Tokyo Electron Tel Tokyo Electron Tel Batch Furnace single wafer deposition system Triase+ Ti/TiN, Application: Contact, Capacitor electrode, Process: CVD Ti/TiN, Wafer Size (mm):300, Wafer Size (mm

Tokyo Electron Tel Tokyo Electron Tel Batch Furnace single wafer deposition system Triase+ Ti/TiN


Designed to deliver optimal solutions for a wide range of challenging thin film depositions.
The Triase+ series offers extra value as the latest single wafer deposition system, by allowing direct incorporation of various 300mm processing modules. The Triase+ series predominately or primarily provides high precision metal deposition process such as Ti, TiN and W for plug and electrode formation with excellent tool reliability. In addition to the metals, Triase+ SPAi for low temperature plasma processing system provides a wide range of critical FEOL applications. The Triase+ series has been applied over the years with an extensive product lineup to suit each and every customer production requirements.

Triase+ Ti/TiN is a 300mm single-wafer metal CVD system for high step coverage Ti/TiN film formation using TiCl4. Based on TEL's industry-proven Trias platform, since its introduction, the system provides low contact resistance film process while reducing contact leakage of various devices. Especially in high-aspect-ratio contact hole, Triase+ SFD TiN has been widely adopted by using SFD technology that has both merits of excellent step coverage of ALD and high productivity of CVD. The Triase+HP Ti, single-wafer metal CVD system, accommodates a lot of additional functions such as optimized surface treatments by unique showerhead gas dispersion module and simultaneous TiSix formation technology during Ti deposition. Furthermore the system provides widen temperature control range, lower particle level and higher productivity. Its unique technology addresses the various process requirements of metal deposition that having the structure such as ultra-shallow junction and nickel silicide contacts. As a successor model, Triase+ HP Ti Plus, which allows higher step coverage for next generation devices, has also been added to the product lineup.

Product Comparison:

Triase+ EX-Ⅱ TiN

Triase+ Ti/TiN

Triase+ W

Triase+ SPAi

Wafer size (mm)






Certified used

Certified used

Certified used

Certified used


Capacitor electrode, Word line barrier,
Metal gate

Capacitor electrode

Contact plug,

Via Fill

Gate nitridation,
Gate recovery oxidation,
STI liner oxidation,
High-k nitridation





Oxidation, Nitridation






Additional features

High step coverage,
Good TiN film property, High speed deposition, Cycle time,
ClF3 cleaning

High step coverage,
Simultaneous TiSi, Formation during Ti deposition,
ClF3 cleaning

High productivity,
ClF3 cleanining

Low tempreture and damageless plasma process, High density and low electron tempreture plasma


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

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A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

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And 100% quality check before shipping.

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