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  • Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS +
Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS +

Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS +

  • Process: Pre/Post clean, Wet etch, PR strip
  • throughput: 600 WPH
  • Wafer Size (mm):300
  • Dry method:SD2
  • Product description: Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS +, Process: Pre/Post clean, Wet etch, PR strip, throughput: 600 WPH, Wafer Size (mm):300, Dry method:SD2
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Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS +

Specifications:

Cost effective batch cleaning system for a long term with recognized by semiconductor manufacturing industry
The EXPEDIUS series is the state-of-the-art cost effective 300mm wafer cleaning system that enables 50 wafers maximum processing in one batch with multiple bath for various chemicals. EXPEDIUS supports not only conventional wet processes such as pre-diffusion/oxidation clean, post-etch clean and resist stripping but also includes newly developed unique functions to realize highly selective wet etch of Oxide/Nitride for 3D NAND device manufacturing with a smaller system footprint and superior productivity.

The EXPEDIUS™ + is a 300mm batch clean system which is the advanced model of the highly reliable UW300Z EXPEDIUS™, a concept endorsed by many semiconductor manufacturers. The EXPEDIUS™ + is designed for 45nm and beyond technology node and has improved upon its predecessor in both performance and productivity. The configuration of the chemical treatment tanks, pure water rinse tanks, and dryer has been optimized to support FEOL clean, which requires particularly stringent process performance. Standard installation of the new SD2 dryer enables significant reduction of 45nm size or less micro-particles. The new SD2 which has been improved from TEL's original IPA dry module decreases the surface tension and prevents pattern destruction of vulnerable structures on the wafer. Furthermore the EXPEDIUS™ + provides high throughput and excellent productivity through a new wafer transportation system with smaller footprint. In addition, its unique batch-formation software option enhances process efficiency regardless of wafer quantity and processing position.

Product comparison

EXPEDIUS™ -i

EXPEDIUS™ +

Wafer size (mm)

300

300

Availability

New

New

Throughput (wph)

1000

600

Process

Pre/Post clean, Wet etch, PR strip

Pre/Post clean, Wet etch, PR strip

Substrates

Si

Si

Dry method

New SD2

SD2

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !