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  • Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS-i
Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS-i

Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS-i

  • Process: Pre/Post clea​n, Wet etch, PR strip
  • throughput: 1000 WPH
  • Wafer Size (mm):300
  • Dry Method: New SD2
  • Product description: Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS-i,

Tokyo Electron Tel Surface Preparation system batch cleaning system EXPEDIUS-i


Cost effective batch cleaning system for a long term with recognized by semiconductor manufacturing industry

The EXPEDIUS series is the state-of-the-art cost effective 300mm wafer cleaning system that enables 50 wafers maximum processing in one batch with multiple bath for various chemicals. EXPEDIUS supports not only conventional wet processes such as pre-diffusion/oxidation clean, post-etch clean and resist stripping but also includes newly developed unique functions to realize highly selective wet etch of Oxide/Nitride for 3D NAND device manufacturing with a smaller system footprint and superior productivity.
The EXPEDIUS-i is the latest auto wet station succeeding from the EXPEDIUS+, a platform featuring further improvements in process performance and productivity. The system has a highly cost effective solution designed for 45nm and beyond technology node for semiconductor manufacturing. The EXPEDIUS-i achieved a throughput of 1,000 wafers per hour (a 150% increase compared with the previous model), high productivity, and low Cost of Ownership. Implementation of the chemical treatment and pure water rinse tanks, well-optimized dryer module improves its cleaning and resist stripping performance significantly. The system realized greatly improvement both etch shape control and process stability for the selective etch process. Furthermore, in order to suppress pattern collapse of vulnerable structures, advanced dryer contributes to reduce processing time drastically and collaborate with optimum sequencing, the system achieved shortened throughput times and the highest level of cost performance in the industry.

SiN etch 3 lot processes

SiN etch uniformity

Product comparison



Wafer size (mm)






Throughput (wph)




Pre/Post clean, Wet etch, PR strip

Pre/Post clean, Wet etch, PR strip




Dry method

New SD2



Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !