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  • Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i
Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i

Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i

  • Process: Pre/Post clean, Wet etch
  • throughput: 1000 WPH
  • Wafer Size (mm):300
  • Dry Method: Hot IPA dry
  • Product description: Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i, Process: Pre/Post clean, Wet etch, throughput: 1000 WPH, Wafer Size (mm):300
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Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i

Specifications:

A state-of-the-art single wafer cleaning system for collapse free drying, higher productivity, and higher reliability
Surface preparation system CELLESTA series for 300mm single wafer clean applied cutting-edge research findings and accumulated experiences in the field. The system provides excellent performance and extendability for advanced clean and dry process with high throughput and smaller footprint. With industry-recognized high reliability and productivity, as a leading-edge cleaning system, CELLESTA is continually evolving to meet technology requirements and customer's needs for advanced clean with new value.

CELLESTA -i for 300mm wafer surface clean processing system provides enhanced productivity and significantly decreased footprint. The system incorporates up to twenty units of cleaning chambers and has much smaller footprint. Furthermore, it is equipped with integrated chemical recycle technology contributing less CoO, physical cleaning function for the particle removal on wafers; all of these functions contribute to achieve higher productivity. Additionally, this platform has excellent system extendibility, which is able to equip advanced bevel clean unit dedicated to wafer periphery and backside clean unit with less chemical consumption.


Product comparison

CELLESTA-i MD

CELLESTA-i

Wafer size (mm)

300

300

Availability

New

New

Throughput (wph)

1000

1000

Process

Pre/Post clean, Wet etch

Pre/Post clean, Wet etch

Substrates

Si

Si

Dry method

New IPA dry /SMD

Hot IPA dry


Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !