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  • Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i MD
Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i MD

Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i MD

  • Process: Pre/Post clean, Wet etch
  • Throughput: Throughput WPH
  • Wafer Size (mm):300
  • Product description: Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i MD, Process: Pre/Post clean, Wet etch, Throughput: Throughput WPH, Wafer Size (mm):300
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Tokyo Electron Tel Surface Preparation system Single Wafer Cleaning System CELLESTA -i MD

Specifications:

A state-of-the-art single wafer cleaning system for collapse free drying, higher productivity, and higher reliability
Surface preparation system CELLESTA series for 300mm single wafer clean applied cutting-edge research findings and accumulated experiences in the field. The system provides excellent performance and extendability for advanced clean and dry process with high throughput and smaller footprint. With industry-recognized high reliability and productivity, as a leading-edge cleaning system, CELLESTA is continually evolving to meet technology requirements and customer's needs for advanced clean with new value.

The CELLESTA -i MD is a TEL's most advanced 300mm single wafer clean system for 10nm technology node and beyond. The system has state-of-the-art cleaning capability which enables damage less clean of the well-patterned wafer surface and damage free particle removal. Pattern collapse free drying technology is also realized by implements of both chamber atmosphere control and performance improvement of IPA dispenser. The system has achieved higher productivity and lower running cost with the use of newly developed chemical recycle concept. The CELLESTA- i MD offers scalability and will strongly support the establishment of the most challenging wafer surface clean process technologies using various chemicals for Cu and other metal exposed layer of next generation devices.

N+1 Pattern collaspe free technology

Product comparison

CELLESTA™-i MD

CELLESTA™-i

Wafer size (mm)

300

300

Availability

New

New

Throughput (wph)

1000

1000

Process

Pre/Post clean, Wet etch

Pre/Post clean, Wet etch

Substrates

Si

Si

Dry method

New IPA dry /SMD

Hot IPA dry

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !