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  • Tokyo Electron Tel SiC Epitaxial CVD system Probus-SiC
Tokyo Electron Tel SiC Epitaxial CVD system Probus-SiC

Tokyo Electron Tel SiC Epitaxial CVD system Probus-SiC

  • Process temps (℃): 1500-1725
  • Throughput <165min @10um thickness
  • Wafer size (mm): 75 100 150
  • Chamber heating: Induction( hot wall) 1500 – 1725℃
  • Product description: Tokyo Electron Tel SiC Epitaxial CVD system Probus-SiC, Process temps (℃): 1500-1725, Throughput <165min @10um thickness, Wafer size (mm): 75 100 150, Chamber heating: Induction( hot wall) 1500 – 17

Tokyo Electron Tel SiC Epitaxial CVD system Probus-SiC


Supporting growth of mass production of SiC power semiconductor expected as energy-saving devices by the state-of-the-art technology
The Probus-SiC series is an automated SiC epitaxial film growth equipment developed by incorporating state-of-the-art technologies such as vacuum technology, transfer technology and high-temperature control technology that TEL has cultivated in the semiconductor manufacturing equipment market. We introduced the most advanced technology in the equipment at all times required by the production site listening carefully to the market needs that evolved as the SiC market grew. As a result, the equipment has capability required not only for process performance side but also for mass production side such as safety, maintenance, operability and reliability, and its performance has been highly appreciated at mass production sites all over the world.
The Probus-SiC is an automated SiC epitaxial film growth equipment. It is possible to install up to two semi-batched wafer process modules on the platform, and to select the equipment configuration according to the purpose from development to mass production. In addition, the tool is for 3/4/6 inches of SiC substrate and it is easy to change the wafer size simply by changing a tray called a holder, and it can easily cope with generation change of the wafer. The heating method is a hot wall type by induction heating method, which can control the high temperature up to 1,725 degrees with high precision and realizes high process performance together with the advanced side flow gas supply method. We are also working on various applications such as thin film, thick film, laminated film, Si face, C face, low off angle, trench filling etc. We strongly support customers with knowledge gained from these experiences.

Within wafer result

3 run/5 wafer epi repeatability

Product Comparison:


Wafer size (mm)






Product carrier load per chamber




Max chambers


Throughput (process time)

<165min @10um thickness

Process temps (℃)


Chamber heating

Induction( hot wall) 1500 – 1725℃


S2, S8, CE


Si-face, C-face, N type, P type

Additional features

Mixed wafer size vis platter


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

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1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !