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  • Tokyo Electron Tel Scrubber Processing System SS4
Tokyo Electron Tel Scrubber Processing System SS4

Tokyo Electron Tel Scrubber Processing System SS4

  • Dry method:SD2(IPA)
  • Throughput (wph): 144
  • Wafer Size (mm):100,150,200
  • Substrates:Si, Sic, Sapphire, LT, LN
  • Product description: Tokyo Electron Tel Scrubber Processing System SS4, Dry method:SD2(IPA), Throughput (wph): 144, Wafer Size (mm):100,150,200, Substrates:Si, Sic, Sapphire, LT, LN
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Tokyo Electron Tel Scrubber Processing System SS4

Specifications:

SS4 is a high reliable scrubber processing system for 100/150/200mm wafers which has years of experience in wafer surface clean both front face and backside. The system reduces surface damage during process with Atotmized Spray 2 (AS2) developed for a state-of-the-art 300mm scrubber system.

Product Comparison:

NS300Z

NS300+ HT

NS300+

NS300

SS4

Wafer size (mm)

300

300

300

300

100,150,200

Availability

New

New

New

Certified used

Certified used

Throughput (wph)

1000

500

320

180

144

Process

DIW scrubber

DIW scrubber

DIW scrubber

DIW scrubber

DIW scrubber

Substrates

Si, Glass

Si, Glass

Si, Glass

Si, Glass

Si, Sic, Sapphire,

LT, LN

Dry method

Spin, N2 blower

Spin, N2 blower

Spin, N2 blower

Spin, N2 blower

SD2(IPA)

Nozzle type

AS2, Brush,

BVL Brush

AS2, Brush,

BVL Brush

AS2, Jet, Brush

AS2, Jet, Brush

AS2, Jet, Brush

Pertical removal performance

>95%

>95%

>95%

>95%

>95%

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !