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  • Tokyo Electron Tel Gas Cluster Ion Beam system UltraTrimmer Plus
Tokyo Electron Tel Gas Cluster Ion Beam system UltraTrimmer Plus

Tokyo Electron Tel Gas Cluster Ion Beam system UltraTrimmer Plus

  • Process: GCIB(Gas Claster Ion Beam)
  • Gas: NF3, O2, N2, Ar
  • Wafer size (mm) 100,150,200
  • Performance: 1σ thickness variation <1nm
  • Product description: Tokyo Electron Tel Gas Cluster Ion Beam system UltraTrimmer Plus, Process: GCIB(Gas Claster Ion Beam), Gas: NF3, O2, N2, Ar, Wafer size (mm) 100,150,200, Performance: 1σ thickness variation <1nm

Tokyo Electron Tel Gas Cluster Ion Beam system UltraTrimmer Plus


Leading trimming technology to bring significant contribution to quality improvement of RF devices
Accelerating growth of mobile networks for smart society by leading-edge smartphones, intelligent cars and innumerable connected IoT devices is expanding the business opportunities for frequency control devices which consist of a number of RF filters. As the cellular market moves to higher frequencies, sensitive control is highly required to meet 4G as well as pre-5G and 5G deployment needs. An energetic, directional, chemical Gas Cluster Ion Beam (GCIB) is used for trimming process to control device parameters of RF filters, MEMS, photonic devices, and other various applications. TEL’s UltraTrimmer series provides precise control of film thickness by reducing surface roughness. Cutting edge technology enables industry leading performance: sub-nanometer thickness control, a wide range of dynamic correction and high-throughput processing. UltraTrimmer series realizes a variety of custom process profiles for silicon or compound substrate and contributes to yield improvement and performance enhancement.
UltraTrimmer Plus™ brings unique trimming technology for 100/150/200mm wafer with industry leading corrective etch capabilities and best in class cost of ownership. To provide higher yield manufacturing, UltraTrimmer Plus™ proposes the most effective solution to reduce various material properties. Its corrective etch enables significant quality improvement of critical layers. Incorporating high accuracy X-Y stage wafer scanning system and newly developed LSP software into APC, through using wafer level metrology data, the system enables film surface planarization and improves etch depth profile of deep trench and hole. Without any hardware changes, the system can handle variety of wafer sizes seamlessly. UltraTrimmer Plus™ provides various applications such as frequency trimming of SAW, BAW and FBAR filters, film surface smoothing of MEMS devices or other timing devices through mechanical and chemical mass etch.

Customer yield map: Devices at target frequency (1)

Customer yield map: Devices at target frequency (2)

Product Comparison:

UltraTrimmer Plus

Wafer size (mm)





GCIB(Gas Claster Ion Beam)


NF3, O2, N2, Ar


1σ thickness variation <1nm


Etching(Frequency trimming,Thickness triming),
Film Conversion(Oxidation, Nitridation),
Film smothing …etc.


High throughput and low CoO,
Corrective etching (Location specific processing),
Room temperature process(No damage, Charging)


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

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1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !