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  • Tokyo Electron Tel FPD Plasma Etch/Ash Equipment PICP
Tokyo Electron Tel FPD Plasma Etch/Ash Equipment PICP

Tokyo Electron Tel FPD Plasma Etch/Ash Equipment PICP

  • Market: TV, Tablet, Monitor
  • Platform:Betelex Impressio
  • Technology: LCD, OLED, a-Si, Metal Oxide
  • Product description: Tokyo Electron Tel FPD Plasma Etch/Ash Equipment PICP, Market: TV, Tablet, Monitor, Platform:Betelex Impressio, Technology: LCD, OLED, a-Si, Metal Oxide
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Tokyo Electron Tel FPD Plasma Etch/Ash Equipment PICP

Specifications:

Satisfying customer’s needs with overwhelming productivity
A Plasma Etch/Ash system generates plasma gas within its chamber to etch thin-film patterns and make electric circuits. Our systems are optimized for manufacturing liquid crystal displays (LCDs) or organic light emitting diode displays (OLEDs). It contributes to high resolution panel manufacturing on Gen6 substrate or large size panel on Gen8/Gen10.5 substrate. Since display devices get higher resolution and higher performance, FPD manufacturing step increases complexity. In this background, FPD customers select TEL FPD Plasma Etch/Ash systems, which meet their requirement.
As flat panel displays for smartphones and other devices require higher resolutions and new technology which realizes exceptional performance like low power consumption, various innovative display interfaces or others, manufacturing FPD requires more refined process, higher productivity, and better yield for Plasma Etch/Ash system. Responding to these technology needs, TEL developed PICP which is the plasma source with Innovative Technology and Concept for large FPD Plasma Etch/Ash system. PICP can produce extremely uniform high density plasma on the substrate and significantly improves process uniformity. At the same time, it lowers power consumption by up to 20% or more (compared with previous TEL models), reducing the risk of electrostatic damage to devices and preventing process excursions in volume production.
PICP can be applied to etch processes on LTPS (Low Temperature Poly-Silicon) devices and metal-oxide devices; metal layer (Al, Mo) etch, insulator layer (SiOx, SiNx) etch, polysilicon layer etch or PR ash.

Product Comparison:

Gen10.5

Gen8.5

Gen6

Gen4.5

Market

TV

TV, Tablet, Monitor

Mobile, AR/VR, Automotive

Mobile, AR/VR, Automotive

Technology

LCD, OLED, a-Si,

Metal Oxide

LCD, OLED, a-Si,

Metal Oxide

LCD, Flexible OLED, LTPS, Metal Oxide

LCD, OLED, LTPS,

Metal Oxide

Substrate size(mm)

2940x3370

2200x2500

1500x1850

730x920

Platform

Impressio

Impressio

Betelex
Impressio

HT

Chamber Mode

ECCP

PICP

PICP

ICP duo, ECCP

Application

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !