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  • Tokyo Electron Tel FPD Plasma Etch/Ash Equipment HT-910
Tokyo Electron Tel FPD Plasma Etch/Ash Equipment HT-910

Tokyo Electron Tel FPD Plasma Etch/Ash Equipment HT-910

  • Market: Mobile, AR/VR, Automotive
  • Techology: LCD, OLED, LTPS, Metal Oxide
  • Application: Silicon layer etching, Insulating layer etching, Metal layer etching, Ashing
  • Product description: Tokyo Electron Tel FPD Plasma Etch/Ash Equipment HT-910, Market: Mobile, AR/VR, Automotive, Techology: LCD, OLED, LTPS, Metal Oxide, Application: Silicon layer etching, Insulating layer etching, Meta
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Tokyo Electron Tel FPD Plasma Etch/Ash Equipment HT-910

Specifications:

Satisfying customer’s needs with overwhelming productivity
A Plasma Etch/Ash system generates plasma gas within its chamber to etch thin-film patterns and make electric circuits. Our systems are optimized for manufacturing liquid crystal displays (LCDs) or organic light emitting diode displays (OLEDs). It contributes to high resolution panel manufacturing on Gen6 substrate or large size panel on Gen8/Gen10.5 substrate. Since display devices get higher resolution and higher performance, FPD manufacturing step increases complexity. In this background, FPD customers select TEL FPD Plasma Etch/Ash systems, which meet their requirement.

HT-910 is a Plasma Etch/Ash system that supports the Gen 4.5 substrates. It can be equipped with up to four process chambers. It has the highest share of the Gen 4.5 market and is a standard system for amorphous silicon and LTPS processes.
HT-910 can be applied to various etch processes; metal layer (Al, Mo) etch, insulator layer (SiOx, SiNx) etch, silicon layer etch or PR ash.
Features
Multi-chamber system: Maximum 4 chambers
Chamber mode: ICP-duo mode/ECCP mode
Substrate size:
730mm x 920mm


Product Comparison:

Gen10.5

Gen8.5

Gen6

Gen4.5

Market

TV

TV, Tablet, Monitor

Mobile, AR/VR, Automotive

Mobile, AR/VR, Automotive

Technology

LCD, OLED, a-Si,

Metal Oxide

LCD, OLED, a-Si,

Metal Oxide

LCD, Flexible OLED, LTPS, Metal Oxide

LCD, OLED, LTPS,

Metal Oxide

Substrate size(mm)

2940x3370

2200x2500

1500x1850

730x920

Platform

Impressio

Impressio

Betelex
Impressio

HT

Chamber Mode

ECCP

PICP

PICP

ICP duo, ECCP

Application

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Silicon layer etching,
Insulating layer etching,
Metal layer etching,
Ashing

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !