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  • Tokyo Electron Tel Etch system Tactras Vigus
Tokyo Electron Tel Etch system Tactras Vigus

Tokyo Electron Tel Etch system Tactras Vigus

  • Process: Low-k, Ox, HARC, Line etch, ALE, SAQP, DD
  • Number of chambers:1-6
  • Wafer Size (mm):300
  • Substrates: Si
  • Product description: Tokyo Electron Tel Etch system Tactras Vigus, Process: Low-k, Ox, HARC, Line etch, ALE, SAQP, DD, Number of chambers:1-6, Wafer Size (mm):300, Substrates: Si
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Tokyo Electron Tel Etch system Tactras Vigus

Specifications:


Tactras, a leading technology provider with proven experience

Tactras series is the latest etch system from TEL. It is capable of continuous vacuum transfer of 300mm wafers and can support up to 6 process chambers with the option to add post process chambers. Tactras™ achieves the world's highest level of wafer transfer speed and footprint. It has been adopted by many customers and continues to evolve

Tactras Vigus is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial. As the solution for etch process challenges, Tactras™ Vigus™ provides customized options for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric etch. The common base product design allows, Tactras Vigus to be built for specific applications. Yield improvement is required even as the device structure is becoming more complex. To deliver etch requirements with high productivity, advanced design technologies have been implemented to achieve excellent wafer uniformity, low wafer-to-wafer variation and high selectivity for thin film stop layers while maintaining high etch rate. Up to 6 Vigus chambers can be installed on the Tactras platform. Tactras Vigus contributes to maximizing improve productivity for semiconductor manufactures with industry leading tool availability by minimizing offset in machine-to-machine and chamber-to-chamber with robust design, particle reduction techniques, introducing unit-assembly inspection method before shipment, and unique labor-saving automated functions.


Product comparison

Tactras™ Vigus™

Certas™ LEAGA™

Tactras™ Vesta™

Tactras™ RLSA™

Tactras™ DRM

Tactras™ SCCM™

Chamber

Vigus™

Certas LEAGA™

Vesta™

RLSA™

DRM

SCCM™

Wafer size (mm)

300

300

300

300

300

300

Availability

New

New

New

New

New

New

Number of chambers

1-6

1-6

1-6

1-6

1-6

1-6

Process

Low-k, Ox,
HARC, Line etch, ALE, SAQP, DD

Ox

Poly, SiN, Ox,
Contact, Mask, Spacer

Ox, SiN, Poly,
Speacer, Contact, HARC, SAC

Ox, SiN,
Contact, Trench, SAC, Spacer, DD

Ox, SiN,
Contact, Trench, SAC, Spacer, DD

Substrates

Si

Si

Si

Si

Si

Si

Safety

S2, CE

S2, CE

S2, CE

S2, CE

S2, CE

S2, CE

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !