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  • Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark-Vz
Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark-Vz

Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark-Vz

  • Process i-line
  • Throughput (wph): Inline:60
  • Wafer size (mm): 75,100,150
  • Substrates Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC, LN, LT
  • Product description: Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark-Vz, Process i-line, Throughput (wph): Inline:60, Wafer size (mm): 75,100,150, Substrates Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC, LN, LT

Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark-Vz


Best selling model with repeated innovative improvements following the posterity
The CLEAN TRACK Mark was the first domestic model of coater/developer for TEL which was based on the photoresist system developed and manufactured in US. The next developed CLEAN TRACK Mark-II was able to transit to larger wafer size to 6 inches with advanced controller. Through multiple efforts like introducing in-line models with exposure tools the system’s continuous improvement involved higher productivity. The CLEAN TRACK Mark-V realized various innovative technologies such as stacked clean oven module layout and high-speed wafer handling robotics, etc, so dramatically changed the concept of the conventional photoresist systems and set the worldwide standards for them.
The CLEAN TRACK Mark-V is the best selling coater developer system for 4 to 6 inch wafers, which developed uniquely by TEL. Mark-V had been shipped over one thousand and hundreds systems worldwide and became the base of industry’s standard through continuous quality improvement and upgrading. With comprehensive range of scale options, valuable knowledge and good experience in the market, after 30 years from release Mark-V has been widely adopted in various applications and is still active in production today.

Product Comparison:

Mark Vz


Wafer size (mm)




Certified used

Certified used

Throughput (wph)


Inline: 90



i-line, KrF


Si, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LT

Si, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LT

Additional features

Transfer robot

Enclosed system


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

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1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !