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  • Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark 7/Mark 8
Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark 7/Mark 8

Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark 7/Mark 8

  • Process i-line KrF
  • Throughput (wph): Inline:90
  • Wafer Size (mm):100,150,200
  • Substrates: Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC, LN, LT
  • Product description: Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark 7/Mark 8, Process i-line KrF, Throughput (wph): Inline:90, Wafer Size (mm):100,150,200, Substrates: Si, GaAs, GaN, GaP,SiC Glass, Sapphire, AlTiC,
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Tokyo Electron Tel Coater/Developer CLEAN TRACK Mark 7/Mark 8

Specifications:

Best selling model with repeated innovative improvements following the posterity
The CLEAN TRACK Mark was the first domestic model of coater/developer for TEL which was based on the photoresist system developed and manufactured in US. The next developed CLEAN TRACK™ Mark-II was able to transit to larger wafer size to 6 inches with advanced controller. Through multiple efforts like introducing in-line models with exposure tools the system’s continuous improvement involved higher productivity. The CLEAN TRACK Mark-V realized various innovative technologies such as stacked clean oven module layout and high-speed wafer handling robotics, etc, so dramatically changed the concept of the conventional photoresist systems and set the worldwide standards for them.
The CLEAN TRACK Mark 7/8's was the innovative coater developer system for 5 to 8 inch wafers with further scaling and improved productivity. It inherited the concept of Mark V that released in 1989 as the top-end models. In addition, plus environment control technology which enables stable and excellent performance, The CLEAN TRACK Mark 7/8’s supports various type of manufacturing scene from research and development to volume production.

Product Comparison:

Mark Vz

Mark7
Mark8

Wafer size (mm)

75,100,150

100,150,200

Availability

Certified used

Certified used

Throughput (wph)

Inline:60

Inline: 90

Process

i-line

i-line, KrF

Substrates

Si, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LT

Si, GaAs, GaN, GaP,SiC
Glass, Sapphire, AlTiC, LN, LT

Additional features

Transfer robot

Enclosed system

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !