Home > Wafer Fabricaton

  • Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro
Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro

Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro

  • process:Immersion, ArF, KrF, i-line, SOC
  • throughput: 200 WPH Inline
  • Wafer Size (mm):200 300
  • Product description: Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro/LITHIUS Pro ーi, process:Immersion, ArF, KrF, i-line, SOC, throughput: 200 WPH, Wafer Size (mm):300

Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro/LITHIUS Pro ーi


A leading-edge industry standard system continues evolving

The CLEAN TRACK LITHIUS Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK ACT series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. As a leading-edge industry standard system, the LITHIUS Series’ high reliability and productivity is recognized by worldwide customers, and even today continues to evolve to meet customer needs for leading-edge technologies.

The CLEAN TRACK LITHIUS Pro is a 300mm process coater/developer offering enhanced productivity and significantly decreased footprint. It supports advanced immersion lithography through innovative modules and integrated metrology for advanced process control solutions. Additionally, this platform improves upon the core track concepts of OEE (Overall Equipment Efficiency) and lower CoO (Cost of Ownership).

Product comparison






Wafer size (mm)











Certified used

Throughput (wph)


Inline: 300

Inline: 250

Inline: 200

Inline: 150


PI, Package, SOD, OCCF, etc.

EUV, Immersion, ArF, KrF, i-line, SOC

Immersion, ArF, KrF, i-line, SOC

Immersion, ArF, KrF, i-line, SOC

Immersion, ArF, KrF, i-line


Si, Glass, Plastic

Si, Glass

Si, Glass

Si, Glass

Si, Glass

Additional features

Flexible configuration for multiple application, High reliability & productivity based on LITHIUS Pro™ Z system

High productivity & process performance,
Low particle wafer transfer system,
OEE improvement,
Reduced cost of chemicals

High productivity,
High throughput with small footprint,
OEE improvement,
Flexible configuration for
double patterning process

High throughput with small footprint,
OEE* improvement,
Reduced cost of chemicals

Metrology integration,
Data analysis "Ingenio",
Immersion process capability


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !