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  • Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro Z
Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro Z

Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro Z

  • Process:EUV, Immersion, ArF, KrF, i-line, SOC
  • throughput: 300 WPH Inline
  • Wafer Size (mm):300
  • Product description: Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro Z, Process:EUV, Immersion, ArF, KrF, i-line, SOC, throughput: 300 WPH Inline, Wafer Size (mm):300
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Tokyo Electron Tel Coater Developer CLEAN TRACK LITHIUS Pro Z

Specifications:

A leading-edge industry standard system continues evolving

The CLEAN TRACK LITHIUS Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK ACT series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. As a leading-edge industry standard system, the LITHIUS Series’ high reliability and productivity is recognized by worldwide customers, and even today continues to evolve to meet customer needs for leading-edge technologies.

CLEAN TRACK LITHIUS Pro Z is TEL's most advanced 300mm coater/developer for the 10nm technology node and beyond. It incorporates user-friendly operation, flexible configurations for future processes, and automated monitoring technology to support a wide range of applications from next generation development to high volume mass production. Compared to the previous generation LITHIUS Pro and Pro V, the LITHIUS Pro Z improves performance in three key areas - defectivity, productivity, and CoO (Cost of Ownership). CLEAN TRACK LITHIUS Pro Z offers increased process flexibility to support advanced immersion lithography, including double and multiple patterning schemes as well as EUV process.

Comparison contact area (@BSP)

Critical CD uniformity control

Product comparison

LITHIUS Pro™ AP

LITHIUS Pro™ Z

LITHIUS Pro™ V

LITHIUS Pro™

LITHIUS™

Wafer size (mm)

300

300

300

200,300

200,300

Availability

New

New

New

New

Certified used

Throughput (wph)

200

Inline: 300

Inline: 250

Inline: 200

Inline: 150

Process

PI, Package, SOD, OCCF, etc.

EUV, Immersion, ArF, KrF, i-line, SOC

Immersion, ArF, KrF, i-line, SOC

Immersion, ArF, KrF, i-line, SOC

Immersion, ArF, KrF, i-line

Substrates

Si, Glass, Plastic

Si, Glass

Si, Glass

Si, Glass

Si, Glass

Additional features

Flexible configuration for multiple application, High reliability & productivity based on LITHIUS Pro™ Z system

High productivity & process performance,
Low particle wafer transfer system,
OEE improvement,
Reduced cost of chemicals

High productivity,
High throughput with small footprint,
OEE improvement,
Flexible configuration for
double patterning process

High throughput with small footprint,
OEE* improvement,
Reduced cost of chemicals

Metrology integration,
Data analysis "Ingenio",
Immersion process capability

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !