Home > Wafer Fabricaton

  • Tokyo Electron Tel Batch Furnace Semi-Batch Chamber NT333
Tokyo Electron Tel Batch Furnace Semi-Batch Chamber NT333

Tokyo Electron Tel Batch Furnace Semi-Batch Chamber NT333

  • Process Chamber: 2Chamber
  • Wafer per Chamber/System: 6/12wafer
  • Wafer size (mm): 300
  • Process: SiO2, SiN, High-k
  • Product description: Tokyo Electron Tel Batch Furnace Semi-Batch Chamber NT333 for ALD (Atomic Layer Deposition), Process Chamber: 2Chamber, Wafer per Chamber/System: 6/12wafer, Wafer size (mm): 300, Process: SiO2, SiN, H
  • INQUIRY

Tokyo Electron Tel Batch Furnace Semi-Batch Chamber NT333

Specifications:

The next step for ever expanding ALD processing.
NT333™ is TEL’s first semi-batch chamber for ALD (Atomic Layer Deposition). It offers thin film thickness control at the atomic level while providing exceptional film quality and high productivity due to employment of the spatial ALD method versus more conventional time divided ALD technology. Multiple substrates can be simultaneously processed within each chamber. The chamber itself is partitioned into complementary sections enabling simultaneous exposure to and adsorption of precursors and other reactants in a continuous mode by substrate rotation. One ALD cycle is performed by one rotation of the wafer stage. No longer is ALD processing limited to ultra-thin films. High productivity ALD is now attainable by high stage rotation speeds along with an optimized gas delivery system made possible by well isolated reaction zones.


NT333™ has large wafer capacity as compared to single or dual wafer processing techniques. With the added capability of pre or post treatment steps included in each ALD cycle, NT333™ is capable of forming films of the highest quality while operating at low temperatures and providing tunable film stresses for a variety of applications. Additionally, NT333™ has unique plasma shield which mitigates plasma damage resulting in high quality films while maintain high stage rotation speeds.

Thermal ALD SiO2 @760℃

Etch amount [nm] @DHF

Product Comparison:

NT333™

Wafer size (mm)

300

Availability

New

Wafer per Chamber/System

6/12wafer

Process Chamber

2Chamber

Reactor

Thermal/Plasma

Features

High step coverage, High quality film, High throughput,

Stress controllability, Low plasma damage

Process

SiO2, SiN, High-k

Substrates

Si, SOI


Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !