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  • Canon anelva LED PVD Equipment  EC8100
Canon anelva LED PVD Equipment  EC8100

Canon anelva LED PVD Equipment EC8100

  • System:Tray cluster PVD equipment
  • Substrate size: φ2
  • Product description: Canon anelva LED PVD Equipment EC8100, System:Tray cluster PVD equipment, Substrate size: φ2" substrate to φ8" substrate

Canon anelva LED PVD Equipment  EC8100


Equipment for Electronic Device Manufacturing and for R&D
EC8100 is tray cluster PVD equipment for small substrate production, such as LED etc.This clustered equipment enable to form multi stacked structure.
ITO transparent layer and metal electrode layer for LED productionFeatures
EC8100 is tray batch PVD equipment with stage rotation function, which realizes good thickness uniformity in wide area. EC8100 realizes high productivity even for small size substrate process.φ2"substrate × 50 / batchφ3"substrate × 25 / batchφ4"substrate × 16 / batchφ6"substrate × 8 / batchφ8"substrate × 4 / batch
Damageless deposition (Long distance sputtering 240 to 340mm)
Good thickness uniformity
Good Target utilization
Small footprint of 30% reduction (comparison of our products)
System: Tray cluster PVD equipment
Substrate size: φ2" substrate to φ8" substrate


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !