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  • Canon MPAsp-E813 Flat-Panel Exposure System
Canon MPAsp-E813 Flat-Panel Exposure System

Canon MPAsp-E813 Flat-Panel Exposure System

  • Resolution: 1.5 μm (L/S)
  • Mask Size: 850 mm x 1,200 mm
  • Maximum Plate Size: 1,500 mm x 1,850 mm
  • One-Shot Exposure Area:750 mm x 1,100 mm
  • Product description: Canon MPAsp-E813 Flat-Panel Exposure System Flat-Panel Exposure Equipment, Resolution: 1.5 μm (L/S), Mask Size: 850 mm x 1,200 mm, Maximum Plate Size: 1,500 mm x 1,850 mm, One-Shot Exposure Area:750 m
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Canon MPAsp-E813 Flat-Panel Exposure System

Specifications:

MPAsp-E813 Flat-Panel Exposure System
Flat-Panel Exposure System for Generation 6 Panels, Size 1,500 mm x 1,850 mm
Features
High-definition production on Generation 6 glass panels
Smartphones, smartwatches and AR/VR (Augmented Reality / Virtual Reality) displays increasingly demand higher definition displays.
MPAsp-E813 flat-panel exposure systems have helped manufacturers realize the production of high-definition panels with Generation 6 glass panels (1500 mm × 1850 mm) and have become indispensable for LCD (Liquid Crystal Display) and OLED (Organic Light Emitting Diode) panel production.
World's highest panel process resolution
MPAsp-E813 systems achieve the world's highest Generation 6 panel process resolution of 1.5 μm for Line & Space patterns (L/S) and 2.0 μm for Contact Holes (CH) (among equivalent class of exposure equipment; examination by Canon).
MPAsp-E813 systems adopt a new mirror optical system design and illumination system that can produce high-definition panels exceeding 800 pixels per inch (ppi).
Overlay accuracy improvement
MPAsp Series flat-panel exposure systems enjoy improved overlay accuracy due to a new magnification correction mechanism and temperature control system.
MPAsp Series flat-panel exposure systems provide higher overlay accuracy at a higher speed when compared to previous flat-panel exposure equipment thanks to the new alignment system.
High productivity & high utilization rate
MPAsp Series flat-panel exposure systems feature wide-field exposure and are capable of producing high-definition display panels efficiently using a one-shot exposure method without stitching.
MPAsp systems boast a high stability and utilization rates thanks in part to stage precision improvements and increases in body rigidity.
Further cycle time reduction options are available to improve productivity and Canon is constantly striving to deliver additional improvements.
Designed for ultra-thin glass panels
Mobile products such as smartphones are required to be lightweight and thin and subsequently, glass panels required for displays must also be thinner.
MPAsp-E813 Series flat-panel exposure systems feature improved glass panel handling technology that makes exposure of a 0.3 mm thickness glass panels a reality.

Resolution

1.5 μm (L/S)

Overlay Accuracy

± 0.3 μm

Projection Optical System

Reflection Projection Optical System

Reduction Ratio

1:1

Mask Size

850 mm x 1,200 mm

Maximum Plate Size

1,500 mm x 1,850 mm

One-Shot Exposure Area

750 mm x 1,100 mm

Main Body Dimensions

(W) 8,000 x (D) 9,900 x (H) 5,700 mm


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