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  • Canon FPA-6300ESW DUV Scanners
Canon FPA-6300ESW DUV Scanners

Canon FPA-6300ESW DUV Scanners

  • Wafer Size: 300 mm
  • Field Size:33 mm x 42.2 mm
  • Overlay Accuracy ≤ 9 nm (|m| + 3 )
  • Dimension: (W x D x H) 2,300 mm × 5,155 mm × 2,900 mm
  • Product description: Canon FPA-6300ESW DUV Scanners, Wafer Size: 300 mm, Field Size:33 mm x 42.2 mm, Overlay Accuracy ≤ 9 nm (|m| + 3 ), Dimension: (W x D x H) 2,300 mm × 5,155 mm × 2,900 mm

Canon FPA-6300ESW DUV Scanners


Canon's New FPA-6300ESW is a wide-field KrF scanner capable of high-resolution across a large exposure area.
FPA-6300ESW is equipped with a wide-field lens.
By changing the projection magnification (4:1 → 3.125:1), Canon realized a wider exposure field with the reticle size remaining at 6 inches.
FPA-6300ESW is the only KrF scanner in the world that can expose full size CMOS image sensor without stitching1 because 33 mm x 42.2 mm can be exposed in one shot.
FPA-6300ESW is a derivation of the proven FPA-6300ES6a platform.
FPA-6300ES6a scanners are already popular in the market.
FPA-6300ESW scanners adopt technology developed to support front-end-of-the-line semiconductor manufacturing processes and can realize the same uptime and reliability as FPA-6300ES6a scanners.
FPA-6300ESW features a scalable platform offering field upgrade plans to improve productivity and overlay accuracy.
1 Stitching exposure: A method of increasing exposure field size by connecting two or more adjacent exposure regions. The positional accuracy and alignment of the adjacent exposure regions directly affects the yield.

Model Type

KrF (248 nm) DUV Scanner

Wafer Size

300 mm


≤ 130 nm

Numerical Aperture (NA)

0.45 ~ 0.70

Reticle Size

6 in. (0.25 in. thick)

Reduction Ratio


Field Size

33 mm x 42.2 mm

Overlay Accuracy

≤ 9 nm (|m| + 3 )

Footprint (W x D x H)

2,300 mm × 5,155 mm × 2,900 mm


AFIS Illumination System

Pellicle Particle Checker

SMIF OHT Compatible

PC Remote Console

Online Functions (GEM2)


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There is English manual or guide video that show you how to use machine.

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2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

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1 set machine, mixed order is also welcomed.

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