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  • Canon FPA-3030i5+ Stepper
Canon FPA-3030i5+ Stepper

Canon FPA-3030i5+ Stepper

  • Wafer Size:200 mm; 150 mm
  • Resolution ≤0.35 µm
  • Field Size: 22 mm x 22 mm
  • Overlay Accuracy ≤40 nm (|m| + 3σ)
  • Product description: Canon FPA-3030i5+ Stepper, Wafer Size:200 mm; 150 mm, Resolution ≤0.35 µm, Field Size: 22 mm x 22 mm, Overlay Accuracy ≤40 nm (|m| + 3σ)

Canon FPA-3030i5+ Stepper


FPA-3030i5+ Stepper
Canon FPA-3030 platform provides performance and productivity improvements. The FPA-3030i5+ is capable of providing imaging resolution below 0.35 microns, while maintaining overlay accuracy of less than or equal to 40nm and throughput equal to or in excess of 104 wafers per hour. Canon developed the FPA-3030i5+ system to meet and exceed the imaging, overlay and productivity requirements of environmentally-conscious device and MEMS manufacturers.
FPA-3030i5+ imaging system provides 0.35µm resolution with a flexible optical system and lens
FPA-3030i5+ platform enhancements help provide alignment accuracy and reliability
FPA-3030i5+ platform supports optional equipment designed to process special environmentally-conscious device substrates
FPA-3030i5+ platform electrical control system and software are modernized to help support future semiconductor manufacturing

Model Type

i-Line (365 nm) Stepper

Wafer Size

200 mm; 150 mm


≤0.35 µm

Numerical Aperture (NA)

0.45 ~ 0.63

Reticle Size

6 in. (0.25 in. thick); optional 5 in.

Reduction Ratio


Field Size

22 mm x 22 mm

Overlay Accuracy

≤40 nm (|m| + 3σ)


≥104 wph (200 mm)

≥120 wph (150 mm)


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1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

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