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Canon FPA-3030EX6 Stepper
Canon's new FPA-3030EX6 KrF excimer laser stepper for the age of "Internet of Things" [IoT] devices is designed to support fabrication of analog chips, sensors and communication devices for IoT and power devices. The FPA-3030EX6 inherits the functionality of its predecessor, the FPA-3000EX6 (released in September 1999), while also offering compatibility with special substrates and functions used in the fabrication of a multitude of devices.
FPA-3030EX6 is compatible with a variety of special substrates
FPA-3030EX6 steppers accommodates small-sized substrates with diameters of 200 mm or less
FPA-3030EX6 steppers are capable of handling a variety of substrate thicknesses and materials including silicon, sapphire, silicon carbide and glass
FPA-3030EX6 steppers share the same wafer feeding system as the FPA-3030i5+ i-line stepper (released in June 2012) that has built a proven track record handling special and small-sized substrates
FPA-3030EX6 is a high performance KrF excimer laser stepper
FPA-3030EX6 steppers deliver the highest levels of resolution, overlay accuracy and productivity (throughput) among KrF excimer laser steppers in the same class*
FPA-3030EX6 steppers provide 150 nm imaging resolution, 25 nm overlay accuracy and 121 wafers per hour throughput**
FPA-3030EX6 IS compatible with FPA-3000EX6 reticle and recipes
FPA-3030EX6 steppers can use the same reticles as the FPA-3000EX6, making possible the effective utilization of existing equipment and assets
FPA-3000EX6 stepper recipe files can be imported and applied to the new FPA-3030EX6 steppers, easing process development challenges
* As of July 4, 2016, based on a Canon survey
** 200mm wafer, 60 shots
KrF (248 nm) DUV Stepper
200 mm; 150 mm; 125 mm; 100 mm
≤ 150 nm
6 in. (0.25 in. thick)
22 mm x 22 mm
≤25 nm (|m| + 3σ)
Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipment，Anlysis/Measurement equipment，Semiconductor production Common equipment.
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If the part is less than 0.5KG, we pay the postage.
If it exceeds 0.5KG, you need to pay the postage.
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