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  • Canon Anelva SiC Electron Bombardment Anneal System (EBAS)  EC7200
Canon Anelva SiC Electron Bombardment Anneal System (EBAS)  EC7200

Canon Anelva SiC Electron Bombardment Anneal System (EBAS) EC7200

  • System: Cluster type (up to three annealing chambers)
  • configuration: C to C type
  • Substrate size: φ3
  • Product description: Canon Anelva SiC Electron Bombardment Anneal System (EBAS) EC7200, System: Cluster type (up to three annealing chambers), configuration: C to C type, Substrate size: φ3", φ4", φ6"
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Canon Anelva SiC Electron Bombardment Anneal System (EBAS)  EC7200

Specifications:


Equipment for Electronic Device Manufacturing and for R&D
EC7200 is a vacuum high temperature annealing equipment which provides excellent annealing characteristic based on the Electron Bombardment Anneal System, which is our original technology.
Applications
SiC power device R&D and production (activation anneal)Features
Implementation of high electrical activation
(Achieve low sheet resistance through high temperature process)
(Reduction of diode leak current)
Rapid heating, cooling
(RTA process and clean vacuum environment)
Excellent repeatability.
(sheet resistance uniformity ±4.9%, 1000 runs)
Supports up to three annealing chambers according to production volume

System:

Cluster type (up to three annealing chambers)

configuration:

C to C type

Substrate size:

φ3", φ4", φ6"

Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !