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  • Canon Anelva PVD Equipment for R&D  EB1000
Canon Anelva PVD Equipment for R&D  EB1000

Canon Anelva PVD Equipment for R&D EB1000

  • System configuration: Tray transport method
  • Substrate size: φ150mm
  • Cathode: φ2
  • Product description: Canon Anelva PVD Equipment for R&D EB1000, System configuration: Tray transport method, Substrate size: φ150mm, Cathode: φ2" cathode ×3

Canon Anelva PVD Equipment for R&D  EB1000


Equipment for Electronic Device Manufacturing and for R&D
The EB1000 is a PVD equipment for R&D with enhanced functions to support simultaneous 3-source sputtering and high temperature heating of substrates while reducing the required space. It is equipped with load lock chamber(option) and provides automated pumping operation as standard to support R&D applications in a variety of fields.
Fully automated vacuum pump operation (Touch screen operation)
Equipped with three φ2" compact cathodes
Simultaneous 3-source sputtering (Option)
Support for various substrate size (≤ φ100mm) and deposition methods (offset self-rotational deposition, static facing deposition) by tray transport
Space saving achieved by compact design

System configuration:

Tray transport method (Load lock is option)

Substrate size:

φ150mm maximum (Have it of load lock;greatest φ100mm)


φ2" cathode ×3

Operation method:

Auto pumping operation, manual transport/deposit operation


W1800mm×D1100mm×H1550mm (standard specification)


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1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !