Home > Wafer Fabricaton

  • Canon Anelva PVD Equipment for LED Production  EL3000 Series
Canon Anelva PVD Equipment for LED Production  EL3000 Series

Canon Anelva PVD Equipment for LED Production EL3000 Series

  • System configuration: Load lock type tray transport method
  • Substrate size: φ2
  • Cathode: Up to φ7.1
  • Operation method: Fully automated (pumping, transport, deposition)
  • Product description: Canon Anelva PVD Equipment for LED Production EL3000 Series, System configuration: Load lock type tray transport method, Substrate size: φ2" substrate to φ8" substrate, Cathode: Up to φ7.1" cathode ×
  • INQUIRY

Canon Anelva PVD Equipment for LED Production  EL3000 Series

Specifications:


Equipment for Electronic Device Manufacturing and for R&D
This is a tray transport type fully automated PVD equipment capable of batch processing multiple substrates and is suitable for production in fields using small substrates such as LED.
Applications
LED production (ITO transparent conductive film, metal electrode film, etc.)Features
Batch processing of multiple substrates by tray transport is possible due to rotary deposition which provides good deposition distribution over a large area.
φ2"substrate ×50/batch
φ3"substrate ×25/batch
φ4"substrate ×17/batch
φ6"substrate ×8/batch
Fully automated operation (pumping, substrate transfer, deposition process)
Standard equipped with up to four φ7.1" cathodes or φ12.5" cathodes
Provides high target utilization with rotary magnetron cathode
Equipment configuration is customizable according to application and production volume through sputtering chamber and stocker mechanism expansion

Specifications

System configuration:

Load lock type tray transport method

Substrate size:

φ2" substrate to φ8" substrate

Cathode:

Up to φ7.1" cathode ×4 or φ12.5" cathode ×4

Operation method:

Fully automated (pumping, transport, deposition)


Keywords:

Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com

FAQ

1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !