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  • Canon Anelva PVD Equipment for Electronic Component Production  EC7400
Canon Anelva PVD Equipment for Electronic Component Production  EC7400

Canon Anelva PVD Equipment for Electronic Component Production EC7400

  • System: Cluster type
  • Substrate size: φ200mm maximum
  • Cathode: φ7.1
  • Modules:Etching module
  • Product description: Canon Anelva PVD Equipment for Electronic Component Production EC7400, System: Cluster type, Substrate size: φ200mm maximum, Cathode: φ7.1" cathode , Modules:Etching module

Canon Anelva PVD Equipment for Electronic Component Production  EC7400


Equipment for Electronic Device Manufacturing and for R&D
EC7400 is a PVD equipment for electronic device production with high quality space-saving design which is the result of our experiences in semiconductor and disk manufacturing equipment.
It is a fully automated cluster type equipment that can accommodate a variety of process modules.
Electronic component productionFeatures
Standard equipped with cassette chamber and transfer chamber (C to C specification)
Delivers excellent deposition distribution
Able to accommodate a variety of process modules according to usage
Provides high target utilization with rotary magnetron cathode


Cluster type (up to three process chambers)


C to C type

Substrate size:

φ200mm maximum


φ7.1" cathode (Up to 4. Varies depending on the module.)


Offset rotary sputtering module (multi-cathode specification)

Offset rotary and revolutionary sputtering module

Etching module (preprocessing)

Preheating module (preprocessing)


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !