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  • Canon Anelva Interconnect PVD Equipment IC7200
Canon Anelva Interconnect PVD Equipment IC7200

Canon Anelva Interconnect PVD Equipment IC7200

  • System:Cluster type
  • Substrate size:φ200mm
  • Product description: Canon Anelva Interconnect PVD Equipment IC7200, System:Cluster type, Substrate size:φ200mm

Canon Anelva Interconnect PVD Equipment IC7200


IC7200  Interconnect PVD Equipment(φ200mm support)
IC7200 is cluster PVD equipment for thin film deposition, main application of which is Semiconductor Interconnect process.Fine uniformity and low level particle are achieved even in reactive PVD or high stress process by the original designed cathode (CAERA).IC7200 is high reliable φ200mm PVD equipment which owns abundant process data.
Interconnect metal process for high volum manufactureing of semiconductor memoryFeatures
CAERA cathode has erosion contorol function by 3 axis magnet rotation
Target utilization is improved by CAERA cathode
PCM (Point Cusp Magent ) cathode is optional IC7200 cathode, which improves step coverage and reduces plasma damage

System:Cluster type


Substrate size:φ200mm


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !