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  • Canon Anelva Inline Type PVD Equipment EL3200
Canon Anelva Inline Type PVD Equipment EL3200

Canon Anelva Inline Type PVD Equipment EL3200

  • System:Horizontal inline type
  • ubstrate size:Effective deposition area 300mm×450mm
  • Cathode:5
  • Product description: Canon Anelva Inline Type PVD Equipment EL3200 for Electronic Component Production, System:Horizontal inline type, ubstrate size:Effective deposition area 300mm×450mm, Cathode:5"×16" cathode×3 (single

Canon Anelva Inline Type PVD Equipment EL3200


Equipment for Electronic Device Manufacturing and for R&D
EL3200 is a horizontal inline type PBC equipment capable of single layer deposition and multi-layer deposition (up to 3 layers) by transporting a square tray one by one to the deposition area.
Electronic component productionFeatures
Selectable between single side sputtering (depo UP or depo DOWN) and both side sputtering according to production volume
Supports laminated films by using up to 3 (single side) cathodes
Can accommodate up to 25 trays in the stocker chamber
Pre-heating chamber (preprocessing) can be expanded (Option)

System:Horizontal inline type


ubstrate size:Effective deposition area 300mm×450mm

Cathode:5"×16" cathode×3 (single side)


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !