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  • Canon Anelva FC7100 Metal Gate Process PVD Equipment
Canon Anelva FC7100 Metal Gate Process PVD Equipment

Canon Anelva FC7100 Metal Gate Process PVD Equipment

  • Substrate size:φ300mm
  • PCM-PVD method
  • High-precision control of (0.1nm unit)
  • Product description: Canon Anelva FC7100 Metal Gate Process PVD Equipment, Substrate size:φ300mm, PCM-PVD method, High-precision control of (0.1nm unit)

Canon Anelva FC7100 Metal Gate Process PVD Equipment


A φ300mm support cluster type PVD equipment for damage-less metal gate production using our original sputtering technology.
Metal gate mass production

Capable of controlled film composition through ultrahigh vacuum co-sputtering.
High-precision control of (0.1nm unit) film thickness and excellent uniformity (1σ < 1%).
Compatible with the sub-32nm node or less damascene gate formation process.
(High-coverage deposition with the PCM-PVD method).
Low material cost through use of compact cathode. Easy material changeover.

System:Cluster Type


Substrate size:φ300mm


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !