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  • Canon Anelva Disk PVD Equipment ML3000 Series
Canon Anelva Disk PVD Equipment ML3000 Series

Canon Anelva Disk PVD Equipment ML3000 Series

  • System configuration: Inline type Substrate size: 2.5 inch, 3.5 inch
  • Productivity: Up to 1800 disks
  • Product description: Canon Anelva Disk PVD Equipment ML3000 Series

Canon Anelva Disk PVD Equipment ML3000 Series


ML3000 Series Disk PVD Equipment
A sputtering equipment that supports mass production and next generation development of magnetic disk which is a key component of hard disk drives.
Mass production and next generation development of hard disk (magnetic disk)Features
Provides approximately twice the productivity (up to 1800 disks/hour) compared to competitive equipment
Over ten days continuous operation.
Excellent expandability enabling expansion of chambers according to customer process
Emphasis on vacuum quality to improve magnetic characteristics (an order of magnitude performance improvement over our previous product).
Provides high temperature heating and cooling unit for the development of next generation thermally assisted magnetic recording media

30% space reduction compared to our previous product

System configuration:

Inline type

Substrate size:

2.5 inch, 3.5 inch


Up to 1800 disks/hour (depending on equipment configuration and process time)

Vacuum performance:

Ultimate pressure around 10-6Pa

Pumping system:

Selectable between TMP and cryo pump


90m2 (P22 configuration)


Semiconductor silicon wafer production equipments, Wafer Fabricaton/12in, Wafer Fabricaton/8in, Wafer Fabricaton/6in Equipment, Wafer Fabricaton/Under 4in Equipment, Wafer Manufactureing Equipment, ASSY/TEST Equipment, Electrical parts equipmentAnlysis/Measurement equipmentSemiconductor production Common equipment.

Flason Electronic Co.,ltd provide a full Silicon Wafer prodocution line solutions, including Scanner Stepper Coat and Develop Dry Etch Asher Furnace RTP Epitaxy CVD PVD Ion Implant Wet Etch CMP Clean and Dry Plating machines and other Simeconductor Production machines you may need, please contact us for more information: wechat whatsapp IMO: 008613691605420, Skype: flasonsmt, Email: sales@flason-smt.com


1) This is the first time I use this kind of machine, is it easy to operate?

There is English manual or guide video that show you how to use machine.

If you still have any question, please contact us by e-mail / skype/ phone /trademanager online service.

2) If machine have any problem after I receive it, how can I do ?

Free parts send to you in machine warranty period.

If the part is less than 0.5KG, we pay the postage.

If it exceeds 0.5KG, you need to pay the postage.

3) MOQ ?

1 set machine, mixed order is also welcomed.

4) How can I buy this machine from you? ( Very easy and flexible !)

A. Consult us about this product on line or by e-mail.

B. Negotiate and confirm the final price , shipping , payment methods and other terms.

C. Send you the proforma invoice and confirm your order.

D. Make the payment according to the method put on proforma invoice.

E. We prepare for your order in terms of the proforma invoice after confirming your full payment.

And 100% quality check before shipping.

F.Send your order by air or by sea.

5)Why choose us ?

A. Gold supplier on Alibaba !

B. Trade assurance to US$54,000 !

C. Best price & Best shipping & Best service !